Board of Directors

Leo Berlinghieri has over 33 years of semiconductor industry experience and has served on the Onto Innovation board of directors since the merger of Rudolph Technologies and Nanometrics in 2019. Mr. Berlinghieri served on the Rudolph Technologies board of directors since 2008. From July 2005 to December 2013, Mr. Berlinghieri served as chief executive officer and president of MKS Instruments, Inc., a critical subsystem supplier to the semiconductor industry. Prior to this, from April 2004 to July 2005, Mr. Berlinghieri served as president and chief operating officer of MKS Instruments after having served this company as vice president and chief operating officer from July 2003 to April 2004, and previously served as a board member of MKS Instruments, Inc. Mr. Berlinghieri served as a director on the North America Advisory Board of Semiconductor Equipment and Materials International (SEMI) from 2005 to 2013, holding the role of chairman in 2012 and 2013. Additionally, Mr. Berlinghieri has served on the Advisory Board of Unipower since 2017.

Steve Kelley joined the Onto Innovation board of directors in 2023. With over 30 years of leadership experience within the semiconductor industry, Mr. Kelley brings to Onto Innovation’s board of directors a strong background in executive management and first-hand knowledge of Onto’s customer base across the entire value chain. He currently serves as president and chief executive officer of Advanced Energy Industries, Inc., which designs and manufactures highly engineered power delivery systems for semiconductor wafer fab equipment and other mission-critical applications. Prior to that, he was president and chief executive officer of Amkor Technology, a leading outsourced semiconductor assembly and test (OSAT) company from 2013 to 2020, which gives him significant knowledge of advanced packaging processes. He has also held executive leadership roles at leading semiconductor manufacturers: Texas Instruments; Philips Semiconductors; and Cree. Mr. Kelley holds an SB ChE from the Massachusetts Institute of Technology and a JD from Santa Clara University.

David Miller has served on the Onto Innovation board of directors since the merger of Rudolph Technologies and Nanometrics in 2019. Mr. Miller served on the Rudolph Technologies board of directors since 2015, most recently as chairman of the board. He has over 40 years of experience within the electronics industry including employment with DuPont for over 35 years in various engineering, sales and management roles and last serving as the president of DuPont Electronics & Communications. Mr. Miller served on the board of directors of Semiconductor Equipment and Materials International (SEMI) from 2011 to 2015. Additionally, he has previously served on the boards of Merrimac Industries (semiconductor packaging), the North Carolina Chamber of Commerce, and several electronics joint venture boards in Asia. Mr. Miller holds a B.S. in electrical engineering from the University of Virginia and currently serves as a trustee of the University of Virginia Engineering School.

Michael Plisinski is the Company’s chief executive officer and has over 25 years of semiconductor capital equipment experience. He previously served as the chief executive officer and member of the board of directors for Rudolph Technologies since 2015. Prior to that, Mr. Plisinski served as the executive vice president and chief operating officer of Rudolph Technologies since October 2014 and was the vice president and general manager, Data Analysis and Review Business Unit since February 2006 when the Company merged with August Technology Corporation. From February 2004 to February 2006, he was August Technology’s vice president of engineering and its director of strategic marketing for review and analysis products from July 2003 to February 2004. Mr. Plisinski joined August Technology as part of the acquisition of Counterpoint Solutions, a supplier of optical review and automated metrology equipment to the semiconductor industry, where he was both president and sole founder from June 1999 to July 2003. Mr. Plisinski has a B.S. in computer science from the University of Massachusetts and completed the Advanced Management Program from Harvard Business School.

Karen Rogge joined the Onto Innovation board of directors in 2021. Ms. Rogge is president of the RYN Group LLC, a management consulting business, which she founded in 2010. She served as the interim vice president and chief financial officer of Applied Micro Circuits Corporation, a semiconductor company, from 2015 to 2016. Previously, Ms. Rogge served as the senior vice president and chief financial officer of Extreme Networks, a computer network company, from 2007 to 2009. Earlier in her career, she held executive financial and operations management positions at Hewlett Packard Company and Seagate Technology. Ms. Rogge currently serves on the board of directors of GigCapital5, Inc. and GigCapital6, Inc., both special purpose acquisition companies. Previously, she was a director at Rambus Inc., a semiconductor company, from 2021 to 2023, Kemet Corporation, an electronic components company which was acquired by Yageo, from 2018 to 2020, and at AeroCentury, an aircraft leasing company, from 2017 to 2018. Ms. Rogge holds an MBA degree from Santa Clara University, and a B.S. degree in business administration from California State University, Fresno. She maintains a National Association of Corporate Directors Board Leadership Fellow credential and has attended the Stanford Directors College.

Christopher Seams is the chairman of the board of directors for Onto Innovation and previously served as a director on the Nanometrics board of directors since August 2015. Mr. Seams served as chief executive officer of Deca Technologies from June 2013 to August 2016, where he was responsible for the overall management of the business. Prior to Deca Technologies, Mr. Seams served as executive vice president of sales and marketing at Cypress Semiconductor and held various technical and operational management positions in its manufacturing, development and operations. Prior to joining Cypress in 1990, Mr. Seams worked in process development for Advanced Micro Devices and Philips Research Laboratories. Mr. Seams also serves on the board of directors of Xperi Inc. Mr. Seams earned his bachelor's degree in electrical engineering from Texas A&M University and his master's degree in electrical and computer engineering from the University of Texas at Austin. Mr. Seams has a professional certificate in advanced computer security from Stanford University. He is a member of the National Association of Corporate Directors and American College of Corporate Directors and a senior member of the Institute of Electrical and Electronics Engineers.

May Su joined the Onto Innovation board of directors in 2022. With over 35 years of leadership experience within the semiconductor capital equipment industry, Ms. Su brings a strong background in strategy and strategic marketing to Onto Innovation’s board of directors. Additionally, she has significant experience in senior management and sales roles from companies such as Lam Research, KLA, Aviza, and Brooks Automation. Ms. Su spent seven years at Brooks Automation in various roles including vice president and general manager for Crossing Automation and vice president of strategic OEM sales. In her final role as vice president of strategic marketing, she was responsible for defining new revenue streams, driving the discussions on trends, customer insights, and early phases of development. From 2018 to 2022, Ms. Su served as chief marketing officer and then CEO of Kateeva, Inc., a privately held display capital equipment company. Ms. Su holds a Bachelor of Science degree in mechanical engineering from Cornell University, a master’s in mechanical engineering from University of California-Berkeley, and an MBA from Santa Clara University, Leavey School of Business. Ms. Su is a member of the National Association of Corporate Directors ("NACD").

Christine Tsingos has served as a director on the Nanometrics board of directors since May 2014. Ms. Tsingos was the executive vice president and chief financial officer of Bio-Rad Laboratories from 2002 until her retirement in 2019. Bio-Rad designs, manufactures and distributes a broad range of innovative products and solutions for the global life science and clinical diagnostic markets. Prior to Bio-Rad, Ms. Tsingos held executive positions at Autodesk, The Cooper Companies, and Attest Systems. Ms. Tsingos also serves on the board of directors of Envista Holdings Corporation, Varex Imaging Corporation, and Telesis Bio Inc. Ms. Tsingos earned her Bachelor of Arts in international studies from the American University in Washington D.C. and an MBA in international business from The George Washington University. In 2010, Ms. Tsingos was awarded the prestigious Bay Area CFO of the Year. Ms. Tsingos is a member of the National Association of Corporate Directors.