Jeffrey Aukerman has previously served on the Rudolph Technologies Board of Directors since 2014. He is a certified public accountant and has extensive public accounting and consulting experience, serving many public and private equity sponsored public reporting companies in the manufacturing, distribution and services industries. From July 1987 to May 2014, Mr. Aukerman was employed by Deloitte & Touche LLP, which, together with its affiliates, is an international audit, consulting, tax and advisory services firm, and served as an audit partner for the most recent fifteen (15) years. He also served in various capacities for the firm, including an audit function professional practice director and a regional leader of internal control subject matter specialists. Mr. Aukerman graduated magna cum laude with a B.S.B.A. in Accounting from Youngstown State University. He currently also serves on the Advisory Council to the Lariccia School of Accounting & Finance at Youngstown State University. Mr. Aukerman is a member of the National Association of Corporate Directors (NACD).

Leo Berlinghieri, Director

Leo Berlinghieri has over 33 years of semiconductor industry experience and has served on the Rudolph Technologies Board of Directors since 2008. From July 2005 to December 2013, Mr. Berlinghieri served as Chief Executive Officer and President of MKS Instruments, Inc., a critical subsystem supplier to the semiconductor industry. Prior to this, from April 2004 to July 2005, Mr. Berlinghieri served as President and Chief Operating Officer of MKS Instruments after having he served this company as Vice President and Chief Operating Officer from July 2003 to April 2004. and previously served as a board member of MKS Instruments, Inc. Mr. Berlinghieri served as a director on the North America Advisory Board of Semiconductor Equipment and Materials International (SEMI) from 2005 to 2013, holding the role of Chairman in 2012 and 2013. Additionally, Mr. Berlinghieri has served on the Advisory Board of Unipower since 2017.

Edward Brown, Jr. has served as a director on the Nanometrics Board of Directors since February 2013. From May 2013 until September 2015, Mr. Brown was the Chief Executive Officer of Cymer Light Source, following the merger of Cymer, Inc. with ASML Holding Ltd., prior to which Mr. Brown served as President and Chief Operating Officer of Cymer, Inc. from September 2005 until May 2013. From 1984 to 2005, Mr. Brown was employed at Applied Materials, Inc., where he held numerous high-level management positions including group vice president and senior advisor to the president, group vice president Worldwide Business Operation, vice president and general manager of the Intel business unit, as well as managing director heading up Etch and CVD product divisions Global Operations. Prior to Applied Materials Inc., Mr. Brown held key engineering positions at TRW Corporation and Burroughs Corporation. Mr. Brown currently serves as a director of Astrodyne TDI, SDSU Campanile Foundation and a UCSD Dean of Jacobs School of Engineering Advisor Emiritus. Mr. Brown received a master’s degree in business administration from National University and a bachelor’s degree in industrial studies from San Diego State University.

Vita Cassese, Director

Vita Cassese joined the Rudolph Technologies Board of Directors in 2018. She is currently the CEO of Mardon Management Advisors, a technology and analytics advisory firm. Additionally, Ms. Cassese is a senior advisor to Vestar Capital Partners, an Executive Partner at Health Enterprise Partners and a member of the Technology Advisory Board of Riverside Partners. With over 30 years of experience in operating and strategic management roles at Pfizer, Ms. Cassese’s last held position was chief information officer of Pfizer’s Worldwide Pharmaceuticals Group. Ms. Cassese is a member of the Board of Directors of Loftware, Inc., Interactive Health and The Medical Knowledge Group. Additionally, she currently is a member of the Board of Trustees of the College of Mount Saint Vincent and serves as a mentor for the Masters in Technology program at Columbia University. Ms. Cassese has been a guest lecturer at New York University's Stern School of Business, MIT Sloan School of Business, and Boston University. Ms. Cassese earned a B.A. in Mathematics from the College of Mount Saint Vincent and an MBA from New York University’s Stern School of Business.

Robert G. Deuster, Director

Robert Deuster has served as a director on the Nanometrics Board of Directors since March 2017. Mr. Deuster served as Chief Executive Officer of Collectors Universe, Inc., a public company that provides authentication and grading services to the global collectibles market from 2012 to 2017, and as a Director from 2012 to 2018. Mr. Deuster served as Chairman and Chief Executive Officer of Newport Corporation, a public company that is a global supplier of laser, optical and motion control products, from May 1996 until his retirement in October 2007. Mr. Deuster served in various senior management positions at Applied Power, Inc. (now Actuant Corporation, a New York Stock Exchange listed company) and General Electric Company's Medical Systems Division. Mr. Deuster served as Director of Ondax Incorporated from 2010 to 2018, as a Director of Symmetry Medical Incorporated from 2014 to 2017, and as a Director of Pico Holdings from 2011 to 2016. Mr. Deuster received a B.S. in Electrical Engineering from Marquette University in 1973. Mr. Deuster holds a Masters Professional Director Certification from the American College of Corporate Directors, a public company director education and credentialing organization.

David B. Miller, Director

David Miller has served on the Rudolph Technologies Board of Directors since 2015, most recently as Chairman of the Board. He has over 40 years of experience within the electronics industry including employment with DuPont for over 35 years in various engineering, sales and management roles and last serving as the President of DuPont Electronics & Communications. Mr. Miller served on the Board of Directors of Semiconductor Equipment and Materials International (SEMI) from 2011 to 2015. Additionally, he has previously served on the boards of Merrimac Industries (semiconductor packaging), the North Carolina Chamber of Commerce, and several electronics joint venture boards in Asia. Mr. Miller holds a B.S. in Electrical Engineering from the University of Virginia and currently serves as a Trustee of the University of Virginia Engineering School.

Michael P. Plisinski, Director and Chief Executive Officer

Michael Plisinski is the Company’s Chief Executive Officer and has over 25 years of semiconductor capital equipment experience. He previously served as the Chief Executive Officer and member of the Board of Directors for Rudolph Technologies since 2015. Prior to that, Mr. Plisinski served as the Executive Vice President and Chief Operating Officer of Rudolph Technologies since October 2014 and was the Vice President and General Manager, Data Analysis and Review Business Unit since February 2006 when the Company merged with August Technology Corporation. From February 2004 to February 2006, he was August Technology’s Vice President of Engineering and its Director of Strategic Marketing for review and analysis products from July 2003 to February 2004. Mr. Plisinski joined August Technology as part of the acquisition of Counterpoint Solutions, a supplier of optical review and automated metrology equipment to the semiconductor industry, where he was both President and sole founder from June 1999 to July 2003. Mr. Plisinski has a B.S. in Computer Science from the University of Massachusetts and completed the Advanced Management Program from Harvard Business School.

Bruce C. Rhine, Director

Bruce Rhine previously served as Nanometrics’ Chairman of the Board of Directors since July 2007 and as a director since July 2006. From July 2006 to February 2008, Mr. Rhine served as Nanometrics’ Chief Strategy Officer. From March 2007 to August 2007, Mr. Rhine served as Nanometrics’ Chief Executive Officer. From 2000 to 2006, Mr. Rhine served as Chairman and Chief Executive Officer of Accent Optical Technologies, Inc. (acquired by Nanometrics in July 2006). Prior to 2000 Mr. Rhine was an executive at Applied Materials, Lam Research Corporation, Asyst Technologies and Air Products and Chemicals. Mr. Rhine co-founded and sold two semiconductor equipment start-ups, MRI Inc. and Obsidian, Inc. Mr. Rhine is an active private equity investor and serves on the board of five private companies. Mr. Rhine holds a B.S. degree in Chemical Engineering and an M.B.A. in Finance from The Pennsylvania State University. Mr. Rhine is a member of the National Association of Corporate Directors (“NACD”) and the American College of Corporate Directors (“ACCD”).

Christopher Seams is currently the Chairman of the Board of Directors and previously served as a director on the Nanometrics Board of Directors since August 2015. Mr. Seams served as Chief Executive Officer of Deca Technologies from June 2013 to August 2016, where he was responsible for the overall management of the business. Prior to Deca Technologies, Mr. Seams served as Executive Vice President of sales and marketing at Cypress Semiconductor and held various technical and operational management positions in its manufacturing, development and operations. Prior to joining Cypress in 1990, Mr. Seams worked in process development for Advanced Micro Devices and Philips Research Laboratories. Mr. Seams also serves on the board of directors of Xperi Corporation, and previously served on the board of directors of Tessera Technologies, Inc. until December 2016. Mr. Seams earned his bachelor's degree in electrical engineering from Texas A&M University and his master's degree in electrical and computer engineering from the University of Texas at Austin. Mr. Seams has a Professional Certificate in Advanced Computer Security from Stanford University. Mr. Seams is a member of NACD and ACCD and is also a senior member of the Institute of Electrical and Electronics Engineers.

Christine Tsingos has served as a director on the Nanometrics Board of Directors since May 2014. Ms. Tsingos was the Executive Vice President and Chief Financial Officer of Bio-Rad Laboratories from 2002 until her retirement in 2019. Bio-Rad designs, manufactures and distributes a broad range of innovative products and solutions for the global life science and clinical diagnostic markets. Prior to Bio-Rad, Ms. Tsingos held executive positions at Autodesk, The Cooper Companies, and Attest Systems. Ms. Tsingos also serves on the board of directors of Envista Holdings Corporation and Varex Imaging Corporation. Ms. Tsingos earned her Bachelor of Arts in International Studies from the American University in Washington D.C. and an MBA in International Business from the George Washington University. In 2010, Ms. Tsingos was awarded the prestigious Bay Area CFO of the Year. Ms. Tsingos is a member of the National Association of Corporate Directors (“NACD”).