Inspectrology LLC Introduces IVS 220 Optical Metrology Solution for High Productivity in 200mm Environments


Inspectrology LLC brings new technology to 200mm metrology with the new IVS 220 which features 165 wafer per hour throughput and sub 1nm precision.

Sudbury, MA — July 9, 2019 — Inspectrology LLC, a manufacturer of optical overlay and CD Metrology Systems, announced today the release of the new IVS 220 at Semicon West. Designed to meet today’s advanced metrology needs, a number of features have been added to the system to build on the solid reputation of the IVS series metrology systems. 

"The IVS 220 will allow us to reduce our metrology cost of ownership while at the same time meet our ever-tightening process requirements." said David Andrews, Lithography Equipment Engineer at Analog Devices Wilmington Manufacturing. "Inspectrology’s IVS series optical metrology systems have been an integral part of our process for over 20 years and the addition of the IVS 220 will help us move to the next level. 

“The IVS 220 brings advanced technology to 75mm-200mm fabs who are pushing the boundaries of their processes.” added Neil Casa, Inspectrology LLC vice president of Engineering. “We have significantly improved throughput and tightened the precision. It was critical for us to maintain the MTBF that the IVS systems are legendary for while pushing performance limits.”

About Inspectrology LLC 

Inspectrology LLC Inc., headquartered in Sudbury, MA, USA, has supplied optical metrology systems to the semiconductor, compound semiconductor, MEMS and LED industries with since 1979, formerly as IVS and Schlumberger. With offices in North America, Europe and Asia, and a large international installed base, Inspectrology LLC has the global reach and expertise to support installations worldwide.