Product News: Onto Innovation Announces Its New Element™ FTIR Technology


New system selected by a leading memory maker for dielectric monitoring of product wafers

WILMINGTON, Mass.--(BUSINESS WIRE)-- Onto Innovation Inc. (NYSE: ONTO) today announced the availability of the Element material analysis platform, which enables customers to monitor and control layers of dielectric thin films, measuring dopants such as boron and phosphorous, as well as monitoring process by-products such as hydrogen. The Element platform was selected by one of the top three memory manufacturers for production monitoring of their advanced devices. Onto Innovation received multiple orders from several of their sites and began first deliveries in the second quarter of 2020.

“With the adoption of the Element platform for these new applications, we are moving beyond our existing served available market (SAM) of measuring impurities and epitaxial thickness for the bare silicon wafer market. We believe the inline production monitoring of thin film dielectrics will increase our 2021 SAM by approximately $30 million,” said Robert Fiordalice, vice president and general manager of the Wafer Business Unit. “Our customers are benefiting from our product output, allowing them to correlate materials characteristics to integration variables like etch selectivity and ultimately parametric yield. We believe the initial orders for the Element FTIR technology indicate a trend for in-line monitoring of materials as the number of dielectrics, and semiconductor materials used in chips is expected to increase exponentially for advanced nodes. Our customer roadmaps indicate a 10X growth in materials monitoring over the next five years.”

“Advanced memory nodes require accurate and stable process control,” said Anoop Somanchi, senior director of product marketing. “Onto Innovation’s new Element FTIR system was selected after a thorough competitive evaluation. This technology, paired with best in class analysis algorithms, captured yield impacting process variation for the customer’s most challenging memory products.”

About Onto Innovation Inc.

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer scale transistors to large die interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient. Headquartered in Wilmington, Massachusetts, Onto Innovation supports customers with a worldwide sales and service organization. Additional information can be found at

Forward Looking Statements

This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”) which include Onto Innovation’s business momentum and future growth; the benefit to customers of Onto Innovation’s products and customer service; Onto Innovation’s ability to both deliver products and services consistent with our customers’ demands and expectations and strengthen its market position as well as other matters that are not purely historical data. Onto Innovation wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Onto Innovation’s control. Such factors include, but are not limited to, the length, severity and potential business impact of the COVID-19 pandemic, the Company’s ability to leverage its resources to gain acceptance and ultimately secure purchase orders for new products; its ability to weather difficult economic environments and/or political protests; its ability to open new market opportunities and target high-margin markets; the strength/weakness of the back-end and/or front-end semiconductor market segments; fluctuations in customer capital spending and any potential impact as a result of the novel coronavirus situation. Additional information and considerations regarding the risks faced by Onto Innovation are available in Onto Innovation’s Form 10-K report for the year ended December 31, 2019 and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on Onto Innovation’s current expectations, the Company cannot guarantee any related future results, levels of activity, performance or achievements. Onto Innovation does not assume any obligation to update the forward-looking information contained in this press release.

Source: Onto Innovation Inc.

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Source: Onto Innovation Inc.